FLOCON Series Gas Management Systems

FLOCON Series Gas Management Systems

Plasmionique FLOCON Series gas management modules are incorporated into all our plasma processing systems, providing precise control of gas flow into the process chamber. The systems are versatile and expandable, and are capable of controlling the flows of gases, vapours and liquids, including bubblers or vaporisers as required. Supporting functions such as control of coolant flows and instrument air are also centralised in the FLOCON module.

The FLOCON modules are available as stand-alone systems which may be integrated into your existing equipment for applications including (but not limited to):

  • Sensor testing
  • Fuel cell testing
  • Chemical Vapour Deposition (CVD)
  • Plasma etching
  • Combustion research

A typical FLOCON system includes the following components:

Component Features (as required)
Gas panel or cabinet
  • Multiple gas lines with mass flow controllers (MFC)
  • Liquid precursor control with liquid MFCs and vaporisers
  • Bubblers
  • Vapour flow controllers
  • Line heaters with controllers for condensible gases
  • Pneumatic shut-off valves
  • Purge valves and vent valves (manual or pneumatic)
  • Overpressure safety relief valve
  • Water-cooling inlet and outlet manifolds with water-flow switches
  • Air manifold with solenoid valves for control of instrument air
  • Sealed enclosures with exhaust port for use with dangerous gases
FLOCON Control Box
  • Interface between system computer and hardware
  • All operations PLC-controlled
  • Single optically-isolated USB port for communication
  • Enclosure to fit standard 19-inch rack (or as specified)
PLASMICON Control Software
  • Programmable flow rates and on/off timing
  • Gas correction factor setting
  • Feedback control of pressure (supply side)
  • Intuitive graphical user interface
  • Alarms & interlocks, which may include:
    • Overpressure
    • Low coolant flow
    • Dangerous gas mix
    • No ventilation or gas leak
    • Other user-defined conditions
  • LabVIEW® based on Microsoft Windows® platform—integration into existing control systems is possible