PRODUCTS: Components and Materials

In addition to our turn-key systems, Plasmionique offers a variety of components and materials, including sources for thin film deposition, plasma sources, substrate manipulators, deposition materials, process controllers, microwave and RF components, and power generators. 

Manetron cathode, sputtering

Magnetron Cathodes

Plasmionique's MAGNION Series of sputtering magnetrons are designed for sputtering from planar targets. Balanced, Unbalanced Type I, and Unbalanced Type II magnetic field configurations are all available. General specifications are included in the pdf. Custom designs for special applications are also possible.

Organic evaporator, K-Cell, Thermal Evaporator

Evaporation Sources

 E-beam, Evaporation boats and Effusion cells.

Substrate Holder, Heated, Rotary, Biasable

Substrate Holders

and Loadlocks

Plasmionique can provide substrate holders with temperature, biasing, and position control and with or without shutters. A typical loadlock would incorporate a stainless steel chamber, turbomolecular pumping package with a manual or pneumatic gate valve for isolation, vacuum gauge, and a magnetically-coupled transfer arm.

Plasma source, Neutral source, Ion Source, ICP

ICP Plasma Sources

Our PLUME Series can be used as remote plasma sources or an immersed plasma source for powder or in-line surface treatment. With a beam extraction module inclusion current densities up to 6 mA/cm^2 can be achieved.

MW-Plasma, Microwave Plasma

Microwave Plasma Sources

Various configurations and power ranges are available. Open the pdf for more information.

Deposition Material

Deposition Materials

We offer a variety of materials for evaporation or sputtering. Please contact us with your specific requirements. The pdf below contains a selection of available materials. If you do not see the pure or composite material you require, give us a call, or Contact us. We will send you a quote.

Optical Emission Diagnostics

Plasma Diagnostics

Emission Spectroscopy, Mass Spectroscopy, Quartz Microbalances, Langmuir Probes, etc.

Contact us for any specific requests.

Ga, Vapor, Vapour, Liquid, Flow management, control
Gas, pod, vapour controller

Gas, Vapour, and Liquid

Flow Control

Precise flow rate, on/off timing, and on durations. Available for individual gases, liquids, or vapours or as integrated systems.

Plasma Process Controller

Power and Process Control

Temperature controllers, actuators, and more. 

Plasmionique is also a distributor of Sairem Microwave Generators: