PVD TURN-KEY SYSTEMS
Plasmionique's PVD systems are highly versatile semi-automated or fully automated customized systems integrating a variety of Physical Vapour Deposition technologies. All systems are controlled by our PLASMICON proprietary control system.

Typical Sputtering System Characteristics
MAGNION Sputtering Magnetrons
Substrate/Sample Mount
Process Environment
Substrate/ Sample Mount
Magnetrons/Plasma Sources
Utility Requirements
-
Target sizes circular 1”, 2”, 3”, 4” diameter, or rectangular
-
Operation with RF(13.56 MHz) DC or Pulsed-DC
-
Balanced or unbalanced magnetic geometries
-
Cross-contamination shields and shutters
-
Option for adjustable axial position or head angle
-
User defined mount size/shape
-
Heating to over 850 ºC with PID temperature control or cooling
-
Motorized sample rotation and axial translation
-
Biasing (RF or DC) available
-
Load-lock sample transfer station (optional)
-
Stainless steel chamber, vertical or horizontal cylindrical
-
Access door or split chamber design
-
Vacuum to 10-8 Torr range with turbomolecular pump backed with rotary vane or dry scroll mechanical pump
-
Operation with oxygen or corrosive gases (optional)
-
Vacuum gauges: wide-range gauge and capacitance manometer for process pressure control
-
FLOCON Series Gas management system for multiple gases or vapors, with mass flow controllers, fully automatic and programmable to tailor the gas mix
-
User defined number of Mass Flow Controllers with shut-off valves
-
Purge/vent line with safety pressure relief valve
-
User defined sample size/shape
-
Heating to over 850 ºC with PID temperature control or cooling
-
Motorized rotation and axial translation motorized or manual
-
Biasing (RF or DC) available
-
Load-lock sample transfer station (optional)
-
Target sizes circular 1”, 2”, 3”, 4” diameter, or rectangular
-
Operation with RF(13.56 MHz) DC or Pulse-DC
-
Balanced or unbalanced magnetic geometries
-
Cross-contamination shields and shutters
-
Option for adjustable axial position or head angle
-
Electrical: typically 60/50Hz, 120 single-phase to 380V 3-phase, 5-wire
-
Cooling water: typically 1-4 gpm, 17-30 ºC, system dependent
-
Instrument air: 40-80 psig (3-5 bar)
-
Purge/vent gas, regulated
-
Process gases, regulated