PVD TURN-KEY SYSTEMS
Plasmionique's PVD systems are highly versatile semi-automated or fully automated customized systems integrating a variety of Physical Vapour Deposition technologies. All systems are controlled by our PLASMICON proprietary control system.
The EVAD Series allows for the evaporation of metals, dielectrics and organic materials using E-beams, Evaporation boats and Effusion cells for application to thin film deposition and epitaxial growth of materials. Large or table-top units with full computer controlled features allow thickness control with high precision. Glovebox integration also available.
Selection of evaporation method mainly depends on vaporization temperature of depositing material:
Evaporation boats, baskets, or filaments for metals, temperatures up to 1800 °C, power up to about 2 kW
Low Temperature Effusion Cell for organics
choice of crucible materials and temperature range to suit material
precise temperature monitoring and PID control
shutter with manual or automatic control
E-beam evaporators (single or multi pocket sources)
The evaporation sources can also be integrated in:
Hybrid Deposition Systems
Roll-to-Roll Deposition Systems