EVAD series CVD and PECVD Horizontal Tube Furnaces are highly versatile units allowing for deposition and synthesis of various types of materials from gaseous, vapour, liquid and solid sources. The rotary versions of our horizontal furnaces are also used for treatment and synthesis of powders.
These furnaces have the option to operate with single- or multi- heating zones. Combined with FLOCON series gas, vapor and liquid flow management systems, they offer unparalleled flexibility. Provisions to tilt the furnace for loading and unloading the powder can be integrated.
Combining the PLUME series ICP plasma sources, with the furnace allows conversion of system to a PECVD Furnace, allowing for PECVD or PE-ALD synthesis on large areas.