PRODUCTS: Turn-Key Systems
Plasmionique offers a variety of products ranging from components for vacuum and low-pressure plasma processing to complete custom-designed plasma, vacuum, and laser based systems for applications to thin-film deposition, etching, and advanced materials synthesis.
Typical Turn-Key System Characteristics
Process Control System
Process Environment
Substrate/ Sample Mount
Magnetrons/Plasma Sources
Utility Requirements
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LabView®-based monitoring and control software
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Intuitive graphical user interface
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Multi-step programming for process recipes
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Plotting and data-logging
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Program mode for programming multi-step processes
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Alarms and interlocks to protect system hardware and warn of unsafe conditions
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Real-time plotting and data logging
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Remote support interface
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Options for Optical Emission and Mass spectroscopy Diagnostic interfaced to process control Plasma Source Option
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Optional Remote ICP source for enhance reactive sputter deposition
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Independent power supply and integrated control included
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Stainless steel chamber, vertical or horizontal cylindrical
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Access door or split chamber design
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Vacuum to 10-8 Torr range with turbomolecular pump backed with rotary vane or dry scroll mechanical pump
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Operation with oxygen or corrosive gases (optional)
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Vacuum gauges: wide-range gauge and capacitance manometer for process pressure control
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FLOCON Series Gas management system for multiple gases or vapors, with mass flow controllers, fully automatic and programmable to tailor the gas mix
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User defined number of Mass Flow Controllers with shut-off valves
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Purge/vent line with safety pressure relief valve
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User defined sample size/shape
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Heating to over 850 ºC with PID temperature control or cooling
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Motorized rotation and axial translation motorized or manual
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Biasing (RF or DC) available
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Load-lock sample transfer station (optional)
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Target sizes circular 1”, 2”, 3”, 4” diameter, or rectangular
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Operation with RF(13.56 MHz) DC or Pulse-DC
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Balanced or unbalanced magnetic geometries
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Cross-contamination shields and shutters
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Option for adjustable axial position or head angle
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Electrical: typically 60/50Hz, 120 single-phase to 380V 3-phase, 5-wire
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Cooling water: typically 1-4 gpm, 17-30 ºC, system dependent
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Instrument air: 40-80 psig (3-5 bar)
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Purge/vent gas, regulated
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Process gases, regulated