Form-PVD | PLASMIONIQUE 2019

Full Name

Affiliation and Position

PVD Selection Guide

Phone

General

Application

General Description of Application

Deposition Technique

Magnetron Sputtering

Pulsed Laser Deposition

Thermal Evaporation (incl. e-beam)

Hybride System

Porte-substrat

Pour le choix d'un mouvement planétaire, veuillez indiquer

Type de porte-substrat

Number of Substrate Slots on Carousel

Substrate Size (include units)

Substrate Motion Option

Axial Motion Control (if selected)

Substrate to Source Distance

Fixed Distance or Variable Range (include units)

Substrate Biasing ?

Heating or Cooling Needs

Magnetron Options (if applicable)

For Circular Magnetrons

For Custom Rectangular Magnetrons

Magnetron Target Size

Magnetron Target Dimensions (include units)

Number of Magnetrons

Number of RF Power Supplies

Number of DC Power Supplies

Number of Pulsing DC Power Supplies

Switch for Sharing Power Sources

Required if a single power supply is to be used by more than one magnetron

Pulsed Laser Deposition Options (if applicable)

PLD Target Size

Number of PLD Targets on Carousel

Thermal Evaporation Options (if applicable)

Number of Thermal Boats

Thermal Boat Capacity (include units)

Number of Boat Power Supplies

Include Ionizer(s) for Boats

Number of e-Beam Crucibles

e-Beam Crucible Capacity (include units)

Number of e-Beam Power Supplies

Include Ionizer(s) for Crucibles

Number of Low Temp. Evaporators

Low Temp. Evaporator Capacity (include units)

Number of Low Temp. Evaporator Power Supplies

Include Ionizer(s) for L.T. Evaporators

Switch for Sharing Power Supplies

Required if a single power supply is to be used by more than one source

Additional Options

Number of Gas Lines

Pump Gate Valve

Loadlock Transfer

ICP Remote Plasma Source

Remote Plasma Source Diamater (include units)

Remote Plasma Source Gas Injection Zones

An additional gas injection ring at the source exit improves performance in PECVD applications with reactive gases that have the potential of forming conductive coatings.

Optical Emission Spectrometer

Number of QCMs

Quartz Crystal Microbalances can be used for rate and thickness monitoring during depositions.

Other Comments

Thank you for your inquiry.

We will be in touch as soon as possible.