Selection of PVD components | PLASMIONIQUE 2019

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Full Name

Affiliation and Position

PVD Selection Guide

Email

Phone

Substrate Holder Type

Substrate Size in Inches

No. Magnetrons

ICP Plasma

Mag. Target Size

Substrate Motion Option

Substrate to Source Distance

Fixed Distance or Variable Range

No. DC Sources

No. RF Sources

Ion Beam Dia.

Switch for Sharing Power Sources

Substrate Biasing ?

Heating or Cooling Needs

No. of QCMs

Deposition Monitoring

Thickness

Rate

Sputtering Power Source Choices

Additional Comments

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