EVAD Series Thermal Vapour Deposition Systems
EVAD

EVAD Series Thermal Vapour Deposition Systems
BROCHURE (PDF)

EVAD Series thermal vapour deposition systems can incorporate Joule heating or an electron beam source, depending on your needs.

Evaporation sources:

  • Evaporation boats, baskets, or filaments for metals, temperature up to 1800 °C, power up to about 2 kW
  • Effusion cell for organics
    • choice of crucible materials and temperature range to suit material
    • precise temperature monitoring (Type K thermocouple) and PID control
    • shutter with manual or automatic control
  • E-beam evaporators (single or multi pocket sources)

 

Substrate mount:

  • Heating or cooling as required
  • Axial adjustment for control of uniformity and deposition rate
  • Shutter & mask with manual or automatic control

 

Process environment:

  • Turbomolecular pump or cryopump combined with a mechanical pump
  • Manual or pneumatically-actuated gate valve for isolation

 

Process control system :

  • LabVIEW® based control system for monitoring and controlling all system variables
  • Intuitive graphic user interface
  • Alarms and interlocks to protect system hardware and warn of unsafe conditions
  • Real-time plotting and data logging
  • Multi-step programming for complicated process “recipes”
  • Quartz crystal microbalance (QCM) for deposition rate measurement and feedback control of evaporation parameters