Hybrid Reactors

In research environments, tools must be versatile to allow innovative processes and materials to be developed. With the research community in mind, Plasmionique has developed a series of “hybrid” reactors which combine two or more deposition technologies in the same chamber. These deposition methods would be available separately as needed, or in some cases may be used in sequence during the same process run without the need for breaking vacuum.

Some examples of configurations which Plasmionique has designed and manufactured include:

MODEL

Sputtering

PECVD (ICP)

ion source

evap. Boats

effusion cell

PLD

HSPT520

SPT420

EVD400-H

SPLD321

HYRENIQUE Series Hybrid Deposition Systems (FLYER, PDF)

Contact us with your requirements.